National Research Council – Institute for Microelectronics and Microsystems

CNR-IMM

The Institute for Microelectronics and Microsystems (IMM-CNR) is based in Catania and is organized in 6 units located in Agrate Brianza, Bologna, Rome, Naples, Lecce and Catania. IMM counts over 200 people as permanent staff (>60% Research Scientists) plus temporary staff including ~100 post-Docs and PhD students. Institute activities span from material science and process development to device fabrication and system integration carried out in the micro- and nano-fabrication facilities present at the different sites (clean-room areas, >1400 m2 in total). Research activities are focused on three main application areas: Micro/Nanoelectronics, Functional materials and devices, Photonics. In addition, the competences and the facilities are coordinated into four main technological areas, Micro/Nanofabrication, Characterization,
Theoretical modelling and Synthesis of Advanced Materials, which provide transversal support to the application areas.
The Unit of Bologna (IMM-BO) (http://www.bo.imm.cnr.it), whose staff comprises more than 50 people (researchers, technicians, administrative staff), is a multi-disciplinary research center that has been working on the study of materials and devices for microelectronics and MEMS for over 30 years. Thanks to the synergy between physics, engineers and chemistry IMM-BO provides a global and flexible approach to the development of innovative technologies for application specific areas. IMM-BO has the largest publicly funded facility for silicon micro-machining in Italy (located in a 500 m2 ISO 5-8 Clean Room), capable of producing different non-VLSI devices, in particular micro-electro-mechanical-systems (MEMS), 3rd generation solar cells and photovoltaic devices. IMM-BO is representing Italy in the EuroNanoLab initiative (http://euronanolab.com) aiming to establish a pan European research infrastructure under the ESFRI program in the field of nanofabrication, by clustering and organizing already existing academic nanofabrication infrastructures on an EU scale. IMM-BO is also coordinating the It-fab initiative (http://itfab.bo.imm.cnr.it/), the Italian network for Micro and Nano Fabrication research infrastructures.

ROLE IN THE PROJECT:

CNR will coordinate the WP4 on the validation of the new techniques with conventional techniques, starting from the well renowned competences in electron microscopy, and will actively collaborate in WP1 on the development and manufacturing of materials, in particular for 2D materials beyond graphene and in WP5 on the development of commonly agreed protocols, as well as in sustainability and impact assessment activities (WP6) and in exploitation, dissemination and networking activities (WP7).

WEBSITE: www.imm.cnr.it

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